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Influence of thin film coatings on the gas sensitivity properties of narrow laser cut gap in In2O3 on glass substrate

Identifieur interne : 01AA96 ( Main/Repository ); précédent : 01AA95; suivant : 01AA97

Influence of thin film coatings on the gas sensitivity properties of narrow laser cut gap in In2O3 on glass substrate

Auteurs : RBID : Pascal:96-0438264

Descripteurs français

Pascal (Inist)
- Capteur chimique, Détecteur de gaz, Conductivité électrique, Capacité électrique, Procédé fabrication, Coupage laser, Verre, Couche mince, Revêtement, Indium oxyde, Sensibilité, Capteur humidité, 0707V.
Wicri :
- concept : Verre.

English descriptors

KwdEn :
- Capacitance, Chemical sensor, Coatings, Electrical conductivity, Gas detector, Glass, Indium oxide, Laser cutting, Manufacturing process, Moisture sensor, Sensitivity, Thin film.

Abstract

New type resistive/capacitive gas sensitive structures were obtained by using a specially prepared substrate, glass, covered by a thin conducting In₂O₃ layer, cut into comb teeth-type electrodes by help of a laser beam. Such laser processed gap in the layer of conducting material was a prototype of an excellent humidity sensor, especially at high values of relative humidity (RH). Different additional coatings onto a laser processed gap were examined for humidity sensing. Sol-gel, vacuum thermal evaporation and laser evaporation methods were used to obtain thin layers of different materials.

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Pascal:96-0438264

Le document en format XML

<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en" level="a">Influence of thin film coatings on the gas sensitivity properties of narrow laser cut gap in In<sub>2</sub>
O<sub>3</sub>
 on glass substrate</title>
<author><name sortKey="Vaivars, G" uniqKey="Vaivars G">G. Vaivars</name>
<affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Institute of Solid State Physics, University of Latvia, 8 Kengaraga St. LV-1063 Riga</s1>
<s2>Latvia</s2>
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<country>Lettonie</country>
<wicri:noRegion>Latvia</wicri:noRegion>
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</author>
<author><name sortKey="Kleperis, J" uniqKey="Kleperis J">J. Kleperis</name>
<affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Institute of Solid State Physics, University of Latvia, 8 Kengaraga St. LV-1063 Riga</s1>
<s2>Latvia</s2>
<s3>LVA</s3>
<sZ>1 aut.</sZ>
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<country>Lettonie</country>
<wicri:noRegion>Latvia</wicri:noRegion>
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</author>
<author><name sortKey="Zubkans, J" uniqKey="Zubkans J">J. Zubkans</name>
<affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Institute of Solid State Physics, University of Latvia, 8 Kengaraga St. LV-1063 Riga</s1>
<s2>Latvia</s2>
<s3>LVA</s3>
<sZ>1 aut.</sZ>
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<country>Lettonie</country>
<wicri:noRegion>Latvia</wicri:noRegion>
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</author>
<author><name sortKey="Vitins, G" uniqKey="Vitins G">G. Vitins</name>
<affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Institute of Solid State Physics, University of Latvia, 8 Kengaraga St. LV-1063 Riga</s1>
<s2>Latvia</s2>
<s3>LVA</s3>
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<country>Lettonie</country>
<wicri:noRegion>Latvia</wicri:noRegion>
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</author>
<author><name sortKey="Liberts, G" uniqKey="Liberts G">G. Liberts</name>
<affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Institute of Solid State Physics, University of Latvia, 8 Kengaraga St. LV-1063 Riga</s1>
<s2>Latvia</s2>
<s3>LVA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
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<country>Lettonie</country>
<wicri:noRegion>Latvia</wicri:noRegion>
</affiliation>
</author>
<author><name sortKey="Lusis, A" uniqKey="Lusis A">A. Lusis</name>
<affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Institute of Solid State Physics, University of Latvia, 8 Kengaraga St. LV-1063 Riga</s1>
<s2>Latvia</s2>
<s3>LVA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>5 aut.</sZ>
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</inist:fA14>
<country>Lettonie</country>
<wicri:noRegion>Latvia</wicri:noRegion>
</affiliation>
</author>
</titleStmt>
<publicationStmt><idno type="inist">96-0438264</idno>
<date when="1996">1996</date>
<idno type="stanalyst">PASCAL 96-0438264 INIST</idno>
<idno type="RBID">Pascal:96-0438264</idno>
<idno type="wicri:Area/Main/Corpus">01A759</idno>
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<seriesStmt><idno type="ISSN">0925-4005</idno>
<title level="j" type="abbreviated">Sens. actuators, B  Chem.</title>
<title level="j" type="main">Sensors and actuators. B, Chemical</title>
</seriesStmt>
</fileDesc>
<profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Capacitance</term>
<term>Chemical sensor</term>
<term>Coatings</term>
<term>Electrical conductivity</term>
<term>Gas detector</term>
<term>Glass</term>
<term>Indium oxide</term>
<term>Laser cutting</term>
<term>Manufacturing process</term>
<term>Moisture sensor</term>
<term>Sensitivity</term>
<term>Thin film</term>
</keywords>
<keywords scheme="Pascal" xml:lang="fr"><term>Capteur chimique</term>
<term>Détecteur de gaz</term>
<term>Conductivité électrique</term>
<term>Capacité électrique</term>
<term>Procédé fabrication</term>
<term>Coupage laser</term>
<term>Verre</term>
<term>Couche mince</term>
<term>Revêtement</term>
<term>Indium oxyde</term>
<term>Sensibilité</term>
<term>Capteur humidité</term>
<term>0707V</term>
</keywords>
<keywords scheme="Wicri" type="concept" xml:lang="fr"><term>Verre</term>
</keywords>
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<front><div type="abstract" xml:lang="en">New type resistive/capacitive gas sensitive structures were obtained by using a specially prepared substrate, glass, covered by a thin conducting In<sub>2</sub>
O<sub>3</sub>
 layer, cut into comb teeth-type electrodes by help of a laser beam. Such laser processed gap in the layer of conducting material was a prototype of an excellent humidity sensor, especially at high values of relative humidity (RH). Different additional coatings onto a laser processed gap were examined for humidity sensing. Sol-gel, vacuum thermal evaporation and laser evaporation methods were used to obtain thin layers of different materials.</div>
</front>
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O<sub>3</sub>
 on glass substrate</s1>
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<fA14 i1="01"><s1>Institute of Solid State Physics, University of Latvia, 8 Kengaraga St. LV-1063 Riga</s1>
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<s2>C</s2>
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<fC01 i1="01" l="ENG"><s0>New type resistive/capacitive gas sensitive structures were obtained by using a specially prepared substrate, glass, covered by a thin conducting In<sub>2</sub>
O<sub>3</sub>
 layer, cut into comb teeth-type electrodes by help of a laser beam. Such laser processed gap in the layer of conducting material was a prototype of an excellent humidity sensor, especially at high values of relative humidity (RH). Different additional coatings onto a laser processed gap were examined for humidity sensing. Sol-gel, vacuum thermal evaporation and laser evaporation methods were used to obtain thin layers of different materials.</s0>
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<s5>03</s5>
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<s5>07</s5>
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<s5>09</s5>
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<fC03 i1="07" i2="X" l="ENG"><s0>Glass</s0>
<s5>09</s5>
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<s5>09</s5>
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<fC03 i1="07" i2="X" l="SPA"><s0>Vidrio</s0>
<s5>09</s5>
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<fC03 i1="08" i2="X" l="FRE"><s0>Couche mince</s0>
<s5>10</s5>
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<fC03 i1="08" i2="X" l="ENG"><s0>Thin film</s0>
<s5>10</s5>
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<fC03 i1="08" i2="X" l="GER"><s0>Duennschicht</s0>
<s5>10</s5>
</fC03>
<fC03 i1="08" i2="X" l="SPA"><s0>Capa fina</s0>
<s5>10</s5>
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<fC03 i1="09" i2="X" l="FRE"><s0>Revêtement</s0>
<s5>11</s5>
</fC03>
<fC03 i1="09" i2="X" l="ENG"><s0>Coatings</s0>
<s5>11</s5>
</fC03>
<fC03 i1="09" i2="X" l="GER"><s0>Ueberzug</s0>
<s5>11</s5>
</fC03>
<fC03 i1="09" i2="X" l="SPA"><s0>Revestimiento</s0>
<s5>11</s5>
</fC03>
<fC03 i1="10" i2="X" l="FRE"><s0>Indium oxyde</s0>
<s5>12</s5>
</fC03>
<fC03 i1="10" i2="X" l="ENG"><s0>Indium oxide</s0>
<s5>12</s5>
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<fC03 i1="10" i2="X" l="GER"><s0>Indiumoxid</s0>
<s5>12</s5>
</fC03>
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<s5>15</s5>
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<s5>15</s5>
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<s5>16</s5>
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<s5>16</s5>
</fC03>
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<s5>16</s5>
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<s5>16</s5>
</fC03>
<fC03 i1="13" i2="X" l="FRE"><s0>0707V</s0>
<s2>PAC</s2>
<s4>INC</s4>
<s5>93</s5>
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<fN21><s1>303</s1>
</fN21>
</pA>
<pR><fA30 i1="01" i2="1" l="ENG"><s1>International Conference on Solid-State Sensors and Actuators</s1>
<s2>8</s2>
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<s4>1995-06-25</s4>
</fA30>
<fA30 i1="02" i2="1" l="ENG"><s1>Eurosensors IX</s1>
<s2>9</s2>
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</fA30>
</pR>
</standard>
</inist>
</record>

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Influence of thin film coatings on the gas sensitivity properties of narrow laser cut gap in In2O3 on glass substrate

Influence of thin film coatings on the gas sensitivity properties of narrow laser cut gap in In2O3 on glass substrate

Descripteurs français

English descriptors

Abstract

Links toward previous steps (curation, corpus...)

Links to Exploration step

Le document en format XML

Pour manipuler ce document sous Unix (Dilib)

Pour mettre un lien sur cette page dans le réseau Wicri